Multi-objective Optimization of Two-Layer Microbeam used for Sensing of Viruses by Genetic Algorithm

Davoodi Yekta, Mohammadreza; Rahi, Abbas

doi:10.30506/jmee.2023.1982755.1307

Multi-objective Optimization of Two-Layer Microbeam used for Sensing of Viruses by Genetic Algorithm

Document Type : Research Paper

Authors

¹ M.Sc., Faculty of Mechanical and Energy Engineering, Shahid Beheshti University, Tehran, Iran

² Assistant Professor, Faculty of Mechanical and Energy Engineering, Shahid Beheshti University, Tehran, Iran

10.30506/jmee.2023.1982755.1307

Abstract

In this paper, new optimizations of the two-layer microbeams based on the classical and non-classical theory are presented. In the first step, the natural frequency is obtained based on the modified couple stress theories. Afterwards, three important functions of the microbeams which are used as microsensors, sensitivity, quality factor, and maximum stress are defined. In the subsequent stage, two and three objective optimizations are carried out by using the genetic algorithm. At the two-objective optimization, sensitivity and quality factor are selected as objective functions. At the three objective optimizations, the maximum stress adds to the objective functions. The geometric parameters are design variables and there are some constraints and limits for those. The results are presented based on the classical and non-classical theory and optimal points are obtained for each optimization by using MATLAB.

Keywords

20.1001.1.16059727.2023.24.1.5.9

Main Subjects

Bio, Micro and Nano Mechanics

References

[1] M. T. Todaro et al., "Piezoelectric MEMS Vibrational Energy Harvesters: Advances and Outlook," Microelectronic Engineering, vol. 183, pp. 23-36, 2017, https://doi.org/10.1016/j.mee.2017.10.005.

[2] F. Narita et al., "A Rview of Piezoelectric and Magnetostrictive Biosensor Materials for Detection of COVID‐19 and Other Viruses," Advanced Materials, vol. 33, no. 1, p. 2005448, 2021, https://doi.org/10.1002/adma.202005448.

[3] H. Nazemi et al., "Advanced Micro-and nano-gas Sensor Technology: A Review," Sensors, vol. 19, no. 6, p. 1285, 2019, https://doi.org/10.3390/s19061285.

[4] B. Tian et al., "The Design and Analysis of Beam-membrane Structure Sensors for Micro-pressure Measurement," Review of Scientific Instruments, vol. 83, no. 4, 2012, https://doi.org/10.1063/1.3702809.

[5] A. Bouchaala et al, "Mass and Position Determination in MEMS Mass Sensors: A Theoretical and an Experimental Investigation," Journal of Micromechanics and Microengineering, vol. 26, no. 10, p. 105009, 2016, 10.1088/0960-1317/26/10/105009.

[6] Kurmendra and R. Kumar, "MEMS Based Cantilever Biosensors for Cancer Detection Using Potential Bio-markers Present in VOCs: A Survey," Microsystem Technologies, vol. 25, no. 9, pp. 3253-3267, 2019, https://doi.org/10.1007/s00542-019-04326-1.

[7] H. H. Kim et al., "Highly Sensitive Microcantilever Biosensors with Enhanced Sensitivity for Detection of Human Papilloma Virus Infection," Sensors and Actuators B: Chemical, vol. 221, pp. 1372-1383, 2015, https://doi.org/10.1016/j.snb.2015.08.014.

[8] S. Park and X. Gao, "Bernoulli–Euler Beam Model Based on a Modified Couple Stress Theory," Journal of Micromechanics and Microengineering, vol. 16, no. 11, p. 2355, 2006, 10.1088/0960-1317/16/11/015.

[9] L.-N. Liang et al, "Flexural Vibration of an Atomic Force Microscope Cantilever Based on Modified Couple Stress Theory," International Journal of Structural Stability and Dynamics, vol. 15, no. 07, p. 1540025, 2015, https://doi.org/10.1142/S0219455415400258.

[10] H. Dai, Y. Wang and L. Wang, "Nonlinear Dynamics of Cantilevered Microbeams Based on Modified Couple Stress Theory," International Journal of Engineering Science, vol. 94, pp. 103-112, 2015, https://doi.org/10.1016/j.ijengsci.2015.05.007.

[11] H.-T. Thai et al., "A Review of Continuum Mechanics Models for Size-dependent Analysis of Beams and Plates," Composite Structures, vol. 177, pp. 196-219, 2017, https://doi.org/10.1016/j.compstruct.2017.06.040.

[12] M. H. Ghayesh, H. Farokhi, and A. Gholipour, "Vibration Analysis of Geometrically Imperfect Three-layered Shear-deformable Microbeams," International Journal of Mechanical Sciences, vol. 122, pp. 370-383, 2017, https://doi.org/10.1016/j.ijmecsci.2017.01.001.

[13] N. Ding et al, "Size-dependent Nonlinear Dynamics of a Microbeam Based on the Modified Couple Stress Theory," Acta Mechanica, vol. 228, pp. 3561-3579, 2017, https://doi.org/10.1007/s00707-017-1895-3.

[14] A. Rahi, "Lateral Vibration of a Micro Overhung Rotor-disk Subjected to an Axial Load Based on the Modified Strain Gradient Theory," International Journal of Structural Stability and Dynamics, vol. 18, no. 09, p. 1850114, 2018, https://doi.org/10.1142/S0219455418501146.

[15] A. Karamanli and M. Aydogdu, "On the Vibration of Size Dependent Rotating Laminated Composite and Sandwich Microbeams via a Transverse Shear-normal Deformation Theory," Composite Structures, vol. 216, pp. 290-300, 2019, https://doi.org/10.1016/j.compstruct.2019.02.044.

[16] A. Gusso, "Nonlinear Damping in Suspended Beam Micro-and Nanoresonators Due to Surface Loss," Journal of Sound and Vibration, vol. 467, p. 115067, 2020, https://doi.org/10.1016/j.jsv.2019.115067.

[17] M. Jahangiri, M. Asghari, and E. Bagheri, "Torsional Vibration Induced by Gyroscopic Effect in the Modified Couple Stress Based Micro-rotors," European Journal of Mechanics-A/Solids, vol. 81, p. 103907, 2020, https://doi.org/10.1016/j.euromechsol.2019.103907.

[18] N. Gan and Q. Wang, "Topology Optimization Design Related to Size Effect Using the Modified Couple Stress Theory," Engineering Optimization, vol. 55, no. 1, pp. 158-176, 2023, https://doi.org/10.1080/0305215X.2021.1990911.

[19] W. Pan et al, "Elastothermodynamic Damping Modeling of Three-layer Kirchhoff–Love Microplate Considering Three-dimensional Heat Conduction," Applied Mathematical Modelling, vol. 89, pp. 1912-1931, 2021, https://doi.org/10.1016/j.apm.2020.09.005.

[20] E. Loghman et al., "Nonlinear Vibration of Fractional Viscoelastic Micro-beams," International Journal of Non-Linear Mechanics, vol. 137, p. 103811, 2021, https://doi.org/10.1016/j.ijnonlinmec.2021.103811.

[21] A. Rahi, "Vibration Analysis of Multiple-layer Microbeams Based on the Modified Couple Stress Theory: Analytical Approach," Archive of Applied Mechanics, vol. 91, no. 1, pp. 23-32, 2021, http://dx.doi.org/10.1007/s00419-020-01795-z.

[22] S. A. Eftekhari and D. Toghraie, "Vibration and Dynamic Analysis of a Cantilever Sandwich Microbeam Integrated with Piezoelectric Layers Based on Strain Gradient Theory and Surface Effects," Applied Mathematics and Computation, vol. 419, p. 126867, 2022, https://doi.org/10.1016/j.amc.2021.126867.

[23] R. Lifshitz and M. L. Roukes, "Thermoelastic Damping in Micro-and Nanomechanical Systems," Physical Review B, vol. 61, no. 8, p. 5600, 2000, https://doi.org/10.1103/PhysRevB.61.5600.

[24] E. Taati and N. Sina, "Multi-objective Optimization of Functionally Graded Materials, Thickness and Aspect Ratio in Micro-beams Embedded in an Elastic Medium," Structural and Multidisciplinary Optimization, vol. 58, pp. 265-285, 2018, https://doi.org/10.1007/s00158-017-1895-x.

[25] I. V. Semiconductor, "Basic Mechanical and Thermal Properties of Silicon," Growth (Lakeland), vol. 22401, no. 540, pp. 1-4, 2000. 22401(540).